A hybrid microfluidic/IC capacitive sensor is develped as shown on figure above for highly integrated lab-on-chips (LoCs). The design has been done in 0.18 um CMOS process. It is incorporated with a microfluidic channel using direct-write microfluidic fabrication process (DWFP). The sensitivity of the developed CMOS capacitive sensor ( 530 mV/fF). To increase the sensitivity another capacitive sensor was proposed where transistors are working in the subthreshold region and where the dynamic range was increased from 2 fF to 15 fF.
Our present work is focused in the development of a prototype on a glass platform where different technologies are mixed together for an invitro diagnosis:
- S is a sample solution
- L1, L2 are the obtained solutions after separation
- De represents the detection part of the chip
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